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State-of-the-Art Instruments for Advanced Materials Science and Semiconductor Defect Inspection

Attolight’s unique knowledge in combined electron and light spectroscopy empowers researchers to gain new insights in materials science and to tackle the semiconductor industry’s advanced process development challenges at and beyond the nanoscale.
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Products

Our Advanced Product Lineup

Discover our high-performance cathodoluminescence solutions, engineered for exceptional materials characterization. Our range includes versatile multi-spectroscopic CL SEM platforms, CL STEM add-ons and automated wafer CL SEM systems, delivering unparalleled precision and adaptability to meet all your materials inspection requirements.

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Technology

About Cathodoluminescence

Attolight revolutionizes cathodoluminescence analysis with its innovative optical collection design, seamlessly integrated into a SEM column. This advanced system enables precise quantitative analysis and enhances the charaterization of any materials, thanks to its highly efficient photon collection.

Elevate your research and quality control standards with Attolight’s cutting-edge technology!

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Trusted by top semiconductor companies and prestigious research institutes worldwide

Applications

Innovative Applications of Cathodoluminescence Technology

Pushing the boundaries of material characterization.

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Power Electronics
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Quantum technologies
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Sensors
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Life sciences
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Energy Materials
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RF / power transistors
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Optoeletronics
Latest

Stay informed with our latest developments and events

Stay informed with the latest developments, breakthroughs, and insights.

New Mönch CL System Installed at Loughborough University

Attolight has successfully installed its advanced Mönch Cathodoluminescence (CL) system at the UK’s National Facility for High-Resolution CL, hosted by Loughborough University. The system, integrated with a Talos F200i TEM, enhances nanoscale optical and structural analysis across UV to near-infrared ranges. Now open to external researchers, it supports cutting-edge studies in semiconductors, photonics, and solar cells.

Introducing the Next-Generation Allalin Spectroscopy Platform

Attolight introduces the next-generation Allalin Platform, now combining CL, TRCL, PL, TRPL, and Raman spectroscopy. This advanced multimodal system enables unmatched nanoscale analysis of structural, optical, and electronic properties — driving breakthroughs in materials science and nanotechnology.

Attolight to Exhibit at ICNS-15 in Malmö, Sweden

Join us at ICNS-15, July 6–11, 2025, in Malmö, Sweden, where we’ll showcase our latest cathodoluminescence solutions for advanced GaN and nitride semiconductor characterization. Visit our booth to learn how we support innovation from epitaxy to device.

Ready to revolutionize your materials characterization approach?

Get in touch with us today to discover how our state-of-the-art cathodoluminescence tools can elevate your research and industry applications.
Already more than 30 systems installed globally!
About

Establishing Cathodoluminescence as a standard inspection method

We are committed to delivering state-of-the-art solutions that provide unparalleled precision, speed, and ease-of-use, enabling our customers to drive performance and innovation in the semiconductor industry and beyond.

By establishing cathodoluminescence as a standard characterization technique, we strive to empower researchers, manufacturers, and industry leaders worldwide.

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